Semiconductor Flow Equipment. Vacuum Tubes & Fittings. Semiconductor Bio-Pharm Hygienic NEUMO Ehrenberg Group

Transcription

1 Semiconductor Flow Equipment Vacuum Tubes & Fittings Semiconductor Bio-Pharm Hygienic NEUMO Ehrenberg Group

2 Semiconductor Flow Equipment - Vacuum Tubes & Fittings Vacuum Components EGMO develops, manufactures, designs and markets high quality stainless steel Vacuum components for the semiconductor industry, gas delivery systems and water purification. EGMO offers a wide product range that includes: R Machined part - KF & ISO connections, bellows R Tubular fittings - Elbows, tees, reducers R Complementary products - Clamp, centering rings R Customized products R Tubes bout EGMO EGMO, a member of the NEUMO Ehrenberg Group, is a worldwide leading manufacturer of high quality stainless steel products for the semiconductor, biopharmaceutical and food industries. Founded in 1965, EGMO brings its customers decades of experience in the development and production of an innovative and extensive range of tubes, fittings, valves, vessels and other special components. EGMO is ISO 9001:2008, CE, SME &CRN certified and its products also meet the following standards: TUV, 3, DIN, ISO, CE, SMS, BS (RJT). NEUMO Ehrenberg Group The NEUMO Ehrenberg Group, a diversified multi - national organization headquartered in Germany, was founded by Senator Henry Ehrenberg in The know - how, experience, and impressive track record of its companies, NEUMO, VNE and EGMO, have been earned over four decades. Today, the group is a leading manufacturer of worldwide stainless - steel process fittings and components. The Group s worldwide distribution network supports major multinational accounts. 2 EGMO NEUMO Ehrenberg Group

3 Index KF Flanges & Fittings... Page 4 ISO Flanges & Fittings... Page 8 Weld Flanges & Fittings... Page 12 How to order Tubing: S M V E Product Line Material Surface Treatment Shape Size Product Line Material Surface Treatment Size Wall Thickness Inch SMV - SCiMax Vacuum E - Electro Polish Stainless Steel Tubing Surface Finish Size inch Wall Thickness SMV-TUBE X0.049 Bright annealed ½" SMV-TUBE X0.065 Bright annealed ¾" SMV-TUBE X0.065 Bright annealed 1" SMV-TUBE X0.065 Bright annealed 1½" SMV-TUBE X0.065 Bright annealed 2" SMV-TUBE X0.065 Bright annealed 2½" SMV-TUBE X0.065 Bright annealed 3" SMV-TUBE X0.083 Bright annealed 4" SMV-TUBE X0.083 nnealed & Pickled 6" SMV-TUBE X0.109 nnealed & Pickled 8" SMV-TUBE X0.109 nnealed & Pickled 10" Semiconductor Flow Equipment - Vacuum Tubes & Fittings 3

4 Semiconductor Flow Equipment - Vacuum Tubes & Fittings NW FLNGES & FITTINGS - PGE 2 (OLD CTLOG) KF Flanges & Fittings NW Flange Fittings - General NW Flange General KF flange fittings are simple and flexible O - ring vacuum couplings similar to the ISO certified KF (or Klein Flange), and QF (Quick Flange) flanges. EGMO KF flanges are compatible with vacuum sealing flanges from European manufacturers; our KF fittings catalogue indicates the tube diameters in inches. n assembly consists of two identical ( sexless ) flanges, a clamp, and a centering ring which aligns the flanges and prevents the O - ring from collapsing. The thumbscrew clamp typical for KF flanges requires no tools for assembly. The system is ideal for small diameter tubing requiring frequent reassembly. KF flange fittings work in rough vacuum plumbing and standard High Vacuum (10-6 Torr) chambers. The elastomeric O - ring limits the temperature range and ultimate vacuum of the assembly. Centering Ring NW Specifications Flange Fittings - Spacifications Clamp Flange Centering Ring O-Ring NW Flange O-Ring Flange Clamp The EGMO KF flange fittings were designed according to ISO 2681 specifications for standard US tube sizes from.375 to 2.00 inches. KF flange fittings can be used in a variety of applications from atmospheric pressure to high vacuum. The KF flange fittings are compatible with other ISO - KF - QF designed flanges. The KF flange fittings are manufactured from 304 and include an aluminum clamp to facilitate frequent disassembly without tools. KF flange fittings can be baked at 150 C when using a UHV Viton O - ring seal which extends in vacuum applications up to 10-8Torr. Centering Ring Centering Ring Clamp Flange O-Ring Clamp NW Flange O-Ring O-Ring Centering Ring EGMO also offers 316L stainless steel KF flange fittings for rugged corrosion resistance in semiconductor processing, with excellent repeatability in high vacuum applications. Flange Clamp Dimensions NW Flange Fittings Dimensions:.10 ISO KF10 15º 15º ISO KF º ISO KF º ISO KF º ISO KF EGMO NEUMO Ehrenberg Group

5 How to order KF Fittings: S M V E - C R - K F Product Line Material Surface Treatment Shape Size KF Size Inch Product line Material Surface treatment Shape Size KF Size Inch SMV - SCiMax Vacuum LU - luminium E - Electro Polish BOF - Board Flange BLF - Blind Flange SWF - Short Weld Flange LWF - Long Weld Flange CR - Centering Ring ssembly CR - Centering Ring OPR - OverPressure ring FB - Flex Bellow KF10 KF16 KF25 KF40 KF KF Bored Flanges Type inch B inch SMV BOF - KF KF - 10 ½" SMV BOF - KF KF - 16 ¾" SMV BOF - KF KF " SMV BOF - KF KF ½" SMV BOF - KF KF " Ø ØB KF Blind Flanges Part Description Type inch SMV BLF - KF KF SMV BLF - KF KF SMV BLF - KF KF SMV BLF - KF KF SMV BLF - KF KF Semiconductor Flow Equipment - Vacuum Tubes & Fittings 5

6 Semiconductor Flow Equipment - Vacuum Tubes & Fittings NW FLNGES & FITTINGS NW Long Butt Weld Flanges NW Long Butt Weld Flanges KF Long Butt Weld Flanges Type inch B inch C inch SMV LWF - KF KF - 10 ½" Ø ØB.100 Ø ØB º 15º SMV LWF - KF KF - 16 ¾" SMV LWF - KF KF " SMV LWF - KF KF ½" SMV LWF - KF KF " ØC ØC KF Short Butt Weld Flanges Type inch B inch C inch E inch SMV SWF - KF KF - 10 ½" SMV SWF - KF KF - 16 ¾" SMV SWF - KF KF " SMV SWF - KF KF ½" SMV SWF - KF KF " NW Short Butt weld Flanges NW Short Butt weld Flanges E.120 E.120 Ø ØB.100 Ø ØB.100 ØC ØC 15º 15º KF Wingnut Clamps Type inch B inch C inch SMV - LU - WNC - KF KF SMV - LU - WNC - KF KF SMV - LU - WNC - KF KF SMV - LU - WNC - KF KF SMV - LU - WNC - KF KF B C 6 EGMO NEUMO Ehrenberg Group

7 KF Centering Ring with Viton O - ring Type O - ring Material inch B inch Ø ØB SMV-304-CR-KF KF - 10 Viton SMV-304-CR-KF KF - 16 Viton SMV-304-CR-KF KF - 25 Viton SMV-304-CR-KF KF - 40 Viton SMV-304-CR-KF KF - 50 Viton KF Overpressure Rings Type inch B inch C inch Max. PSIG SMV OPR - KF KF SMV OPR - KF KF SMV OPR - KF KF SMV OPR - KF KF SMV OPR - KF KF NW Reducer St Ø C ØB KF Flex Bellow Type inch Length SMV FB - KF KF SMV FB - KF KF SMV FB - KF KF SMV FB - KF KF SMV FB - KF KF Length Semiconductor Flow Equipment - Vacuum Tubes & Fittings 7

8 Semiconductor Flow Equipment - Vacuum Tubes & Fittings ISO Flanges & Fittings General ISO flanges conform with vacuum flange standards issued by the International Standards Organization (ISO). They share the same underlying concept as the KF flange series in that two faced sexless flanges clamp together with a sealing device between them. Each flange face has a counter - bore and a fitting metal ring with an elastomeric O - ring around its outer diameter. The centering ring has two roles: 1. It aligns the flanges. 2. It prevents the O - ring from being pushed in by the external atmospheric pressure when the joint is under vacuum. ISO flanges have two clamping mechanisms holding the flanges together: 1. The first uses separate clamps hooked over the outer edge of the mating flanges and spaced around the circumference (Figure ). 2. The second uses conventional bolt holes in the flange periphery (Figure B). The clear advantage of the multi - part flange is that it mates simply by using the appropriate pieces in the assembly. Specifications The EGMO ISO flange system is designed and manufactured according to ISO standard 2861/1 for simple constructing of vacuum systems in the semiconductor industry. The ISO flange system consists of two basic flange types and several fastening methods shown in figures & B (Page 13). The standard material supplied for fittings is Type 304 stainless steel, or special 304L material. Material can be supplied in OD (rgon Oxygen Decarburization), ISO components can be baked to 204 C and can be used with standard clamps and aluminium seals to obtain a UHV seal bakeable to 150 C. Double claw clamps are used when a pair of flanges is joined (figure B). lternatively, single claw clamps are used to join a non - rotatable flange with a pump or gate valve. This method allows the flanges to be rotated for easy component alignment. dditionally, a rotatable bolt ring can be used to fasten the flanges to a non - rotatable flange using bolts (figure B). retainer ring prevents the flanges from slipping through the bolt ring. Non - rotatable ISO flanges are assembled with bolts (figure B). The ISO flange system is interchangeable with other manufacturers (MF, LF, PF, ISO - K), and the flange interface dimensions are machined according to international standards. 8 EGMO NEUMO Ehrenberg Group

9 . Optional Fastener / Optional Fastener with Double Claw Clamp B. Non - Rotatable / Non - Rotatable with Bolts How to order ISO Fittings: S M V E - C R - I S O Product Line Material Surface Treatment Shape Size ISO Size Inch Product line Material Surface treatment Shape Size ISO Size Inch SMV - SCiMax Vacuum LU - luminium E - Electro Polish BOF - Board Flange BLF - Blind Flange LWF - Long Weld Flange HNF - Half Nipple Flange CR - Centering Ring ssembly DCC - Double Claw Clamp FB - Flex Bellow ISO63 ISO80 ISO100 ISO160 ISO200 ISO Semiconductor Flow Equipment - Vacuum Tubes & Fittings 9

10 Semiconductor Flow Equipment - Vacuum Tubes & Fittings ISO Blind Flanges Flange Size inch B inch SMV BLF - ISO ½" ISO B SMV BLF - ISO " ISO Seal Side SMV BLF - ISO " ISO SMV BLF - ISO " ISO SMV BLF - ISO " ISO SMV BLF - ISO " ISO ISO Board Flanges Flange Size inch B inch C inch D inch SMV BOF - ISO ½" ISO SMV BOF - ISO " ISO SMV BOF - ISO " ISO Seal Side Seal Side Ø ØD ØC B SMV BOF - ISO " ISO SMV BOF - ISO " ISO SMV BOF - ISO " ISO ISO Double Claw Clamps Flange Size inch B inch Thread Size Clamps Required SMV - LU - DCC - ISO ISO / SMV - LU - DCC - ISO ISO / SMV - LU - DCC - ISO ISO / B Thread Size SMV - LU - DCC - ISO ISO / SMV - LU - DCC - ISO ISO / SMV - LU - DCC - ISO ISO / EGMO NEUMO Ehrenberg Group

11 ISO Centering Rings with O-Ring and luminum Spacer Ring Type O - ring Material inch B inch Diagram SMV-304-CR-ISO ISO - 63 Viton SMV-304-CR-ISO ISO - 80 Viton SMV-304-CR-ISO ISO Viton SMV-304-CR-ISO ISO Viton ØB Ø SMV-304-CR-ISO ISO Viton ISO Half Nipples Type B inch SMV HNF - ISO ISO ½" SMV HNF - ISO ISO " SMV HNF - ISO ISO " SMV HNF - ISO ISO " SMV HNF - ISO ISO " B ISO Flexible Bellow Flange Type Length Compressed Length SMV FB - ISO ISO ½" SMV FB -ISO ISO " SMV FB - ISO ISO " SMV FB - ISO ISO " SMV FB - ISO ISO " SMV FB - ISO ISO " ISO Flexible B Length Semiconductor Flow Equipment - Vacuum Tubes & Fittings 11

12 Semiconductor Flow Equipment - Vacuum Tubes & Fittings Weld Flanges & Fittings General EGMO designs and manufactures a complete butt - weld vacuum fittings line together with its full line of NW, CF, ISO and S flanges. The standard material supplied for fittings is type 304 stainless steel, specifically prepared for use in high vacuum processes or UHV applications. Special 304L and 316L material can be supplied on request. Butt - weld fittings are used in vacuum applications where minimizing the number of sealed joints is critical. EGMO butt - weld vacuum fittings are put together using a pulled port and 100% TIG weld techniques penetration. ll Butt - Weld fittings are leak free and cleaned for high vacuum use and then marked with the heat number of raw material, size and job number enabling full traceability to all material used, and to EGMO production data. Full Material Test Reports (MTR) are supplied with the finished goods, or via the EGMO website, indicating the item job number. EGMO butt - weld vacuum fittings are packed in individual bags. ll EGMO butt - weld vacuum fittings are individually labelled for easy identification. EGMO develops and fabricates Stainless Steel water systems and tubular fittings for the semiconductor industry. The fittings are suitable for orbital welding and available in ½ - 4 OD sizes. ISI 304L, 316L materials are available. The fittings are fabricated according to STM / STM requirements. Surface finish is unpolished Bright nnealed. Other surface finishes are available upon request. How to order But Weld Fittings: S M V - B W E - E L T G Product Line Type Material Surface Treatment Shape Size Tangant Product line Type Material Surface treatment Shape Size Tangant SMV - SCiMax Vacuum BW - But Weld Fittings E - Electro Polish EL90 - Elbows 90 EL45 - Elbows 45 TEE - Tee RTEE - Reduce TEE CORD - Conical Reducer TG - with Tangent Blank - No Tangent 12 EGMO NEUMO Ehrenberg Group

13 90 Radius Elbows inch SMV - BW EL ½" SMV - BW EL ¾" SMV - BW EL " SMV - BW EL ½" SMV - BW EL " SMV - BW EL ½" SMV - BW EL " SMV - BW EL " SMV - BW EL " SMV - BW EL " SMV - BW EL " Note: lso available in 316L R R 90 Radius Elbows with Tangents Size Inch inch SMV - BW EL TG ½" SMV - BW EL TG ¾" SMV - BW EL TG 1" SMV - BW EL TG 1½" SMV - BW EL TG 2" SMV - BW EL TG 2½" SMV - BW EL TG 3" SMV - BW EL TG 4" SMV - BW EL TG 6" SMV - BW EL TG 8" Note: lso available in 316L R R Semiconductor Flow Equipment - Vacuum Tubes & Fittings 13

14 Semiconductor Flow Equipment - Vacuum Tubes & Fittings 45 Radius Elbows inch SMV - BW EL ½" SMV - BW EL ¾" SMV - BW EL " SMV - BW EL ½" SMV - BW EL " SMV - BW EL ½" SMV - BW EL " SMV - BW EL " SMV - BW EL " SMV-BW-304-EL " Note: lso available in 316L R Elbow without Tangent 45º R 45 Radius Elbows with Tangents inch SMV-BW-304-EL ½" SMV-BW-304-EL ¾" SMV-BW-304-EL " SMV-BW-304-EL ½" SMV-BW-304-EL " SMV-BW-304-EL ½" SMV-BW-304-EL " SMV-BW-304-EL " SMV-BW-304-EL " Note: lso available in 316L R 45º R 14 EGMO NEUMO Ehrenberg Group

15 Tees inch SMV-BW-304-TEE-0.5 ½" SMV-BW-304-TEE-0.75 ¾" SMV-BW-304-TEE-1.0 1" SMV-BW-304-TEE-1.5 1½" SMV-BW-304-TEE-2.0 2" SMV-BW-304-TEE-2.5 2½" SMV-BW-304-TEE-3.0 3" SMV-BW-304-TEE-4.0 4" SMV-BW-304-TEE-6.0 6" SMV-BW-304-TEE-8.0 8" Note: lso available in 316L Reducer Tees inch B inch SMV-BW-304-RTEE-1.0X0.75 1" x ¾" SMV-BW-304-RTEE-1.5X0.75 1½" x ¾" SMV-BW-304-RTEE-1.5X1.0 1½" x 1" SMV-BW-304-RTEE-2.0X1.0 2" x 1" SMV-BW-304-RTEE-2.0X1.5 2" x 1½" SMV-BW-304-RTEE-2.5X1.5 2½" x 1½" SMV-BW-304-RTEE-2.5X2.0 2½" x 2" SMV-BW-304-RTEE-3.0X1.5 3" X 1½" SMV-BW-304-RTEE-3.0X2.0 3" x 2" SMV-BW-304-RTEE-3.0X2.5 3" x 2½" SMV-BW-304-RTEE-4.0x1.5 4''x1.5" SMV-BW-304-RTEE-4.0x2.0 4''x2" SMV-BW-304-RTEE-4.0x2.5 4" x 2½" SMV-BW-304-RTEE-4.0x3.0 4" x 3" SMV-BW-304-RTEE-6.0X3.0 6" X 3" SMV-BW-304-RTEE-6.0X4.0 6''x Note: lso available in 316L B Semiconductor Flow Equipment - Vacuum Tubes & Fittings 15

16 Semiconductor Flow Equipment - Vacuum Tubes & Fittings Conical Reducers inch SMV-BW-304-CORD-1.0X0.75 1" x ¾" SMV-BW-304-CORD-1.5X0.75 1½" x ¾" SMV-BW-304-CORD-1.5X1.0 1½" x 1" SMV-BW-304-CORD-2.0X1.0 2" x 1" SMV-BW-304-CORD-2.0X1.5 2" x 1½" SMV-BW-304-CORD-2.5X1.5 2½" x 1½" SMV-BW-304-CORD-2.5X2.0 2½" x 2" SMV-BW-304-CORD-3.0X2.0 3" x 2" SMV-BW-304-CORD-3.0X2.5 3" x 2½" SMV-BW-304-CORD-4.0X1.5 4''x1.5" SMV-BW-304-CORD-4.0X2.0 4''x2" SMV-BW-304-CORD-4.0X2.5 4" x 2½" SMV-BW-304-CORD-4.0X3.0 4" x 3" SMV-BW-304-CORD-6.0X4.0 6''x Note: lso available in 316L 16 EGMO NEUMO Ehrenberg Group

17 Conical Reducers With Tangent inch SMV - BW CORD - 1.0X0.75 TG 1" x ¾" SMV - BW CORD - 1.5X0.75 TG 1½" x ¾" SMV - BW CORD - 1.5X1.0 TG 1½" x 1" SMV - BW CORD - 2.0X1.0 TG 2" x 1" SMV - BW CORD - 2.0X1.5 TG 2" x 1½" SMV - BW CORD - 2.5X1.5 TG 2½" x 1½" SMV - BW CORD - 2.5X2.0 TG 2½" x 2" SMV - BW CORD - 3.0X1.5 TG 3" x 1½" SMV - BW CORD - 3.0X2.0 TG 3" x 2" SMV - BW CORD - 3.0X2.5 TG 3" x 2½" SMV - BW CORD - 4.0X1.5 TG 4" x 1½" SMV - BW CORD - 4.0X2.0 TG 4" x 2" SMV - BW CORD - 4.0X2.5 TG 4" x 2½" SMV - BW CORD - 4.0X3.0 TG 4" x 3" SMV - BW CORD - 6.0X4.0 TG 6" x 4" 5.50 Note: lso available in 316L Semiconductor Flow Equipment - Vacuum Tubes & Fittings 17

18 Semiconductor Flow Equipment - Vacuum Tubes & Fittings MTR - Material Test Report The MTR is the reference document for the entire history of the production processes and the raw materials used to make the SCiMax component. Vendor Warehouse Production Testing Marking Customers The MTR document is easily generated on - line via egmo.co.il using only the job number as input. The job number is the product identification number which represents all processes and raw materials related to the specific item. ON - LINE MTR ON - LINE MTR The MTR format provides the following information: Part number, part description and job number Material type Heat Number per each component describing the fitting and its associated properties: Tube dimensions and standards Chemical composition Mechanical properties Visual, dimensional, corrosion, EDDY current testing, flaring and flattening, PMI Test Certificate of Compliance 18 EGMO NEUMO Ehrenberg Group

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20 NEUMO EHRENBERG GROUP GLOBL LOCTIONS NEUMO GmbH+Co. KG (D) Tel: +49 (0) Fax: +49 (0) E - Mail: info@neumo.de GERMNY VNE Corporation Tel: Fax: E - Mail: stainless@vnecorp.com U.S. EGMO Ltd. Tel: +972 (0) (0) Fax: +972 (0) E - Mail: salese@egmo.co.il ISREL NEUMO - EGMO Spain S.L Tel: Fax: E - Mail: neumo - es@neumo - es.com - es.com SPIN HPT Inc. Tel: E - Mail: sales@hptinc.com U.S. Herrli G Tel: +41 (0) Fax: +41 (0) E - Mail: info@herrli.net SWITZERLND NEUMO Polska Sp. z.o.o Tel: +48 (0) Fax: +48 (0) E - Mail: neumo@neumo.pl POLND NEUMO Turkey Tel: +90 (212) Fax: +90 (212) E - Mail: info@neumo.com.tr TURKEY NEUMO Budapest Kft Tel: +36 (1) (1) Fax: +36 (1) E - Mail: neumo@neumo.hu HUNGRY NEUMO LLC Tel: Minh.Vietnam@neumo.de VIETNM NEUMO - VRGUS (Shanghai) Trading Co., Ltd Tel: +86 (21) Fax: +86 (21) E - Mail: info@neumo.com.cn CHIN NEUMO UK Ltd. Tel: +44 (0) Fax: +44 (0) E - Mail: stainless@neumo.co.uk UNITED KINGDOM /2018 Edition: 4 EGMO Ltd. Marcom Department WH rmaturenwerke (D) Hötensleben GmbH Tel: +49 (0) Fax: +49 (0) E - Mail: info@awh.de Damstahl GmbH (D) Tel: +49 (0) Fax: +49 (0) E - Mail: ds@damstahl.de Gebr. Rieger GmbH+Co. KG (D) Tel: +49 (0) Fax: +49 (0) E - Mail: info@rr - rieger.de - rieger.de GERMNY NEUMO Tel: +353 (0) Cel: +353 (0) E - Mail: dosullivan@neumo.de IRELND Damstahl a/s Oslo (N) Tel: Fax: E - Mail: dano@damstahl.com NORWY Damstahl a/s (Denmark) Tel: +45 (0) Fax: +45 (0) E - Mail: ds@damstahl.com DENMRK Damstahl a/b (Sweden) Tel: Fax: SWEDEN Semiconductor Bio-Pharm Hygienic